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KLA-Tencor Alpha-Step IQ Profilometer

Alpha-Step IQ (2D benchtop surface profiler), HRP 350 series (high resolution surface profiler) provide comprehensive surface metrology analysis and surface topography control solutions to meet the needs of the most demanding surface profiling applications.


*Surface profilometer with 400 micron vertical range.

*Alpha-Step precision scanner standard vertical range to 400um with sub-angstrom electronic bit-wise vertical resolution.

*Zoom optics (88-247x)

*Stylus, 5um – 60Degree Radius

*Maximum scan length: 10mm

*Manual precision X-Y stage, 6.2” diameter theta table

*Acoustic Isolation hood and vibration isolation supports.