Smooth operation and precise control are the Supercritical Autosamdri®-815B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 4", 3", 2" wafers or 10mm square die per process run!
Microprocessor controller allows for complete automatic processing.
All internal surfaces are inert to CO2 and ultra pure alcohols.
Repeatable operating parameters insuring reproducibility of results.
Integrated temperature controls.
Internal rupture disc built in for safety.
Processes up to 5 x 4" diam. wafers per run; comes with additional HF compatible wafer holders to process 5 x 3", 5 x 2" diameter wafers or 5 x 10mm square die (Tousimis HF compatible Wafer Holders* can be used to transport and process your wafers and die from HF).
All electronic components meet CE, UL and/or U.S. Military Specifications.
Static pressure control module pre-set for automatic safe pressure stability.
0.4µm internal filtration system delivers clean filtered LCO2 to process chamber.
Under-lit chamber with viewing window facilitates operator chamber status viewing.
An efficient adiabatic cooling system*, capable of cooling the chamber from ambient room temperature to near 0°C, in less than 3 minutes and maintains temperature automatically during both FILL and PURGE modes.
LED's instantly indicate process mode at a glance.
Clean room static-free compatible design.
For added safety and convenience, the U.S. Patented SOTER™ condenser* quietly captures exhaust and alcohols.
Unique chamber inserts* allow variance of chamber I.D. This maximizes efficiency in LCO2 consumption and processing time.