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Zeiss Supra 55VP Field Emission Scanning Electron Microscope

The Supra55VP FESEM allows surface examination down to nanometer scales in either high vacuum or in Variable Pressure (VP) model. It has an Energy Dispersive x-ray Spectrometer (EDS) for elemental analysis and mapping, an Electron BackScattered Diffraction (EBSD) system for crystal orientation and phase mapping using Kikuchi patterns, and Nanometer Pattern Generation System (NPGS) which provides powerful, versatile, and easy to use system for doing electron beam lithography.


Ultra high resolution at low kV: 1.7nm @ 1.0kV, 4 nm @ 0.1kV

Quantitative elemental analysis of the "bulk" material

Fast elemental mapping and / or linescan of area of interest

Topographical, compositional and other information

Detection of small variations of trace element content

Analysis and imaging of samples in their natural, hydrated state without the use of cryo

Digital output

Oil-free vacuum

Large specimen capacity

Rapid (10 minute turnaround) sample introduction