The Micro-Fabrication and High Precision Manufacturing Laboratory (or Nikola Tesla Laboratory) is one of UTARI’s advanced manufacturing components that alone encompasses over six million dollars worth of high-end industrial equipment. The other advanced manufacturing laboratories are the Prototyping Laboratory, System Integration Laboratory, and Packaging & Inspection Laboratory.
The Nikola Tesla Laboratory supports silicon and non-silicon material processing of MEMS with support from a unique collection of fabrication, inspection, and packaging tools. Capabilities include laser micromachining, laser welding, X-ray inspection, deposition, sputtering, plasma cleaning, adhesive printing, and many others. The Nikola Tesla Laboratory in-houses three-bays, 750ft 2 modular cleanroom with a Class 10,000 bay, a Class 1,000 bay, and a Class 100 bay that contains equipment for MEMS processing. The Nikola Tesla Laboratory is accessible to researchers from academia and industry.
It is a unique environment that allows users to conduct Research and Development through our “User Facility program.” Also, it supports the research and product development activities of UTARI’s researchers and affiliated faculty.