The Micro-Fabrication and High Precision Manufacturing Laboratory (or Nikola Tesla Laboratory) alone encompasses over six million dollars worth of high-end industrial equipment.
The lab supports silicon and non-silicon material processing of MEMS with support from a unique collection of fabrication, inspection, and packaging tools. Capabilities include laser micromachining, laser welding, X-ray inspection, deposition, sputtering, plasma cleaning, adhesive printing, and many others. The Precision Manufacturing Laboratory houses three-bays, 2 modular cleanrooms with a Class 10,000 bay, a Class 1,000 bay, and a Class 100 bay that contains equipment for MEMS processing.
It is a unique environment that allows users to conduct research and development through our User Facility program. It also supports the research and product development activities of UTARI’s researchers and affiliated faculty.