Cheng Luo, Ph.D.

Mechanical and Aerospace Engineering Department

Research Interests:

  • Nanolithographic methods for generating sub-50nm silicon, metal, and conducting polymer structures in a manner of rational control and massive production
  • Micro/nanodevices (such as sensors, diodes and capacitors) based on these nanostructures
  • Micro/nanoboats

Funded Research Topic(s) & Sponsoring Agency:

  • Generation Of Sidewall Patterns Using A Thermal Shape-Memory Polymer (NSF)
  • Development Of A Nanopunching Lithography Method For Generating Sidewall Templates And Polymer-Based Nanodevices (NSF)

Contact Information

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Cheng Luo, Ph.D., Mechanical and Aerospace Engineering